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HFC-23 (Trifluoromethane)
Identification
Synonyms: Trifluoromethane; R-23; Hydrofluorocarbon 23; HFC23; Fluoroform
CAS No.: 75-46-7 EC No.: 200-872-4 RTECS No.: PB6900000
Molecular Formula: CHF3
Structural Formula: 
Molecular Weight: 70.01
m.p.: -155.2°C
b.p.: -82.1°C
Vapor pressure: 4.38Mpa @ 20°C
ODP: 0
GWP: 12000 (CO2=1)
Preparation
HFC-23 is a by-product while manufacturing R22 or Tetrafluoropropylene
Application
1) HFC-23 is used as refrigerant, sometimes as a replacement for CFC-13
2) Used in semiconductor industry in plasma etching of silicon oxide and silicon nitride
3) Used as a total flooding fire extingushing agent
Specification*
| Items | Specification |
|---|---|
| HFC-23 purity | 99.5% min. |
| Moisture | 10 ppm max. |
| Non-valatile residues | 0.001% max. |
| Acidity | 1 ppm max. |
| Odor | odorless |
| NAG (Vol) | 1.5% max. |
| Appearance | colorless and transparent |
Standard Packaging
380kgs / steel welded cylinder, 16 cylinders/20’ full container.
Risks and Safety Information
HFC-23 is regulated by UN as non-flammable, compressed gas
UN1984,
Class 2.2,
PG: Unknown
S-Phrase: S38
Green house gas with GWP 12000
For more information, please see MSDS